MS7207-A2 Pressure Sensor Die (0-7 bar)
MS7207-A2
INTERSEMA
Product Description:
Features1) 0 to 700 kPa range (7 bar or 102 PSI) 2) Media resistive pressure sensor die 3) Typical output Span 150mV @ 5 V 4) Temperature range -40°…+150°C 5) Linearity 0.15% (typical) 6) Die size 1.73 x 1.18 mm2 7) Pads on one side 8) Low cost, high reliability & stability 9) Absolute pressure sensor ApplicationsHarsh environments DescriptionThe MS7207-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7207-A2 is suitable for media-resistive applications.
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