MS7218-A2 Pressure Sensor Die (0-18 bar)
MS7218-A2
INTERSEMA
Product Description:
Features1) Media resistive pressure sensor die 2) 0 to 18 bar range (261 PSI) 3) Output span 150 mV @ 5 V 4) Linearity 0.05% 5) Pads on one side 6) Die size 1.73×1.18 mm 7) Absolute pressure sensor 8) High Reliability 9) Low Cost Applications1) Braking systems 2) Tire pressure 3) Engine control 4) Oil pressure
DescriptionThe MS7218-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7218-A2 is suitable for media-resistive applications.
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