MS7228A Pressure Sensor Die (0-28 bar)
MS7228A
INTERSEMA
Product Description:
Features1) Media resistive pressure sensor die 2) 0 to 28 bar range (406 PSI) 3) Output span 150 mV @ 5 V 4) High linearity (0.05% typical) 5) Absolute sensor of 1.95×1.63 mm 6) High Reliability 7) Low Cost Applications1) Braking systems 2) Tire pressure 3) Engine Control 4) Diving Computers
DescriptionThe MS7228 is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex? cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled Pyrex? is bonded on the backside. As the pressure port consists of Pyrex? and silicon, both stable in most of the chemicals, the MS7228 is suitable for media-resistive applications.
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