MS7305D Pressure Sensor Die (0-0.05 bar)
MS7305D
INTERSEMA
Product Description:
Features1) 0 to 50 mbar range(0.73PSI)2) High linearity(typ.0.3%@5kPa,0.1%@1kPa)3) High reliability,Low Cost4) Output span of 110mV @5VApplications1) Washing machines2) Level indicators3) Industrial control 4) Leak detectionDescriptionThe MS7305D pressure sensor die is designed for low pressure sensor systems with the highest demands on resolution and accuracy. Its sensor element consists of a silicon micro-machined membrane bonded on a PyrexTM glass support. The sensor signal is proportional to the pressure difference back and front side of the membrane. The pressure is sensed by four implanted piezoresistors.The MS7305D exists in two versions:the first one with the bond pads on one side only, the other one with some bond pads on the opposite side.
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