MS765 Pressure Sensor Die (0-0.5 bar)
MS765
INTERSEMA
Product Description:
Features1) 0 to 0.5 bar range (7.25 PSI) 2) Output span 170 mV @ 5 V 3) Absolute or Differential 4) Small Die size 2.1 x 1.96 mm 5) High Reliability, Low Cost Applications1) Liquid level control 2) Industrial applications 3) Blood pressure meters 4) Variometers DescriptionThe sensor element of the MS765 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS765-A_0.2) or 0.5 mm (MS765-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS765-D) and the other without Pyrex glass (MS765-S).
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