MS7801 Pressure Sensor Die (0-1 bar)
MS7801
INTERSEMA
Product Description:
Features1) 0 to 1 bar range (14.5 PSI) 2) High linearity (0.05% typical) 3) Absolute or Differential 4) Small Die size 1.84×1.98 mm 5) High Reliability, Low Cost Applications1) Altimeters 2) Barometers 3) Variometers DescriptionThe sensor element of the MS7801 consists of a silicon micro-machined membrane with a Pyrex? glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7801A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7801D) has a hole in the Pyrex? glass at the backside of the sensor.
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