MS7812 Pressure Sensor Die (0-12 bar)
MS7812
INTERSEMA
Product Description:
Features1) 0 to 12 bar range (174 PSI) 2) High linearity (0.05% typical) 3) Absolute or differential 4) Very Small Die size 2.1×1.96 mm 5) High Reliability, Low Cost Applications1) Engine controls 2) Diving computer DescriptionThe sensor element of the MS7812 consists of a small silicon micro-machined membrane with a Pyrex? glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor MS7812A carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor MS7812D has a hole in the Pyrex? glass at the backside of the sensor.
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