MS7905 Pressure Sensor Die (0-5 bar)
MS7905
INTERSEMA
Product Description:
Features1) 0 to 500 kPa range (5 bar or 73 PSI) 2) Uncompensated pressure sensor die 3) Output span 150mV @ 5V 4) Uncompensated pressure sensor die 5) Temperature range -40°…+125°C 6) Linearity 0.05% (typical) 7) Very small die size 1.72 x 1.58 mm (MS7904-A) 8) High Reliability, Low Cost 9) Absolute or differential pressure sensors Applications1) Engine controls 2) Dive computers DescriptionThe sensor element of the MS7905 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7905-A_0.2) or 0.5 mm (MS7905-A_0.5). Two gauge versions are available: one with a drilled Pyrex glass (MS7905-D) and the other without Pyrex glass (MS7905-S).
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