MS7912 Pressure Sensor Die (0-12 bar)
MS7912
INTERSEMA
Product Description:
Features1) 0 to 12 bar range (174 PSI) 2) High linearity (0.05% typical) 3) Absolute or differential 4) Small Die size 1.72×1.58 mm 5) High Reliability, Low Cost 6) Absolute or differential pressure sensors Applications1) Engine controls 2) Diving computer
DescriptionThe sensor element of the MS7912 consists of a silicon micro-machined membrane with a Pyrex? glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7912D) has a hole in the Pyrex? glass at the backside of the sensor.
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